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IMM-200 Thin Film Deposition Monitor

MAKING EXCELLENCE REPEATABLE

Protect and Grow Your Profit with Precision Rate and Thickness Monitoring.

IMM-200 is a deposition monitor built with ModeLock technology to maximize reproducibility and uniformity with the highest thickness accuracy, best measurement resolution, and lowest rate noise.

With the oscillator built-in IMM-200 can be easily integrated into an Ethernet system with minimal hardware and footprint. This powerful and precise measurement monitor is sure to bring a new level of performance to your process.

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FEATURES

  • INFICON ModeLock technology provides the longest crystal life and ensures the most stable, highest resolution rate and thickness measurement available, even at very low rates.
  • Maximize yield with the best QCM thickness measurement possible
  • Single channel rate and thickness monitor without unnecessary added features to minimize cost
  • ±0.0035 Hz over 100 ms sample
  • Ethernet communications for seamless integration
  • Compact size to minimize integration costs by saving tool real estate
  • Expert application support, able to discuss unique application needs and give greater support than the competition
  • RoHS compliant

TYPICAL APPLICATIONS

  • Semiconductor Manufacturing
  • OLED Applications
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PDMAT SemiQCM Datasheet
IMM-200 Brochure
IMM-200 Operating Manual (English)
Thin Film Catalog 2021
Thin Film Catalog 2021 (Chinese)