Inficon

UHV Bakeable Sensor

INFICON UHV Bakeable Crystal Sensors offer proven reliability and durability and have the best thermal stability of any sensor head on the market. Made from 304 Stainless Steel, Molybdenum, Inconel, Nickel, and Alumina materials, the UHV Bakeable Sensor is designed to withstand continuous bakeout temperatures up to 450° C (for bakeout only, water flow required for actual deposition monitoring). The front load design allows for easy insertion of the crystal holder in applications lacking sufficient room for side insertion.

Use Part Finder to select sensor configuration.

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FEATURES

  • High temperature braze & welded construction
  • Bakeout temperatures to 450° C
  • Crystal shutter (option)
  • Front load crystal holder
  • Easy installation
  • CF40 feedthrough
  • No brazing or welding to feedthrough required
  • Sensor/feedthrough combination welded to customer specified lengths
Your Part Number: BK-
X X X X

NOTE 1:
UHV Bakeable Sensor orders are measured from centre of the crystal to the vacuum side (sealing surface) of the feedthrough. Once a welded sensor order is confirmed, it cannot be cancelled.

NOTE 2:
All UHV Bakeable Sensors are welded to a CF40 feedthrough.

NOTE 3:
Shutter air tube is connected to the feedthrough tube using VCR fittings for field replacement.

1. Type of sensor

(Includes crystal snatcher and user manual. Crystals sold separately)

2. Shutter assembly

(see note 3)

3. Length of sensor

(see note 1)

4. Welded Sensor Length

(see notes 1 and 2)

BK--ZZZZ

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UHV Bakeable Sensor Datasheet (English)
UHV Bakeable Sensor Operating Manual (English)
Thin Film Catalog 2021
Thin Film Catalog 2021 (Chinese)