Sputtering Sensor

The INFICON Sputtering Sensor is specifically designed for use in any sputtering process. The sensor body and cooling tubes are gold plated beryllium copper for maximum cooling efficiency in the sputtering environment. A magnet built into the sensor head reduces excessive heating by energetic free electrons in sputtering systems by deflecting them with the external magnetic field. The rear loading crystal holder design allows easy crystal replacement without having to remove the sensor head from the system.

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  • Gold plated beryllium copper sensor body and cooling tubes for maximum cooling efficiency
  • Magnet to deflect free electrons away from the monitor crystal
  • Easy installation with bendable water tubes allowing flexibility in sensor placement
  • Rear load crystal insertion for easy crystal replacement
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Includes 30.75 in. (78cm) in-vac cable, crystal snatcher, pack of 10 silver crystals, and manual (other in-vac cable lengths available separately)

1. Type of Sensor


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Sputtering Sensor Datasheet (English)
Sputtering Sensor Operating Manual (English)
Thin Film Catalog 2021
Thin Film Catalog 2021 (Chinese)
Sputtering Sensor Shutter Installation Instructions (English)