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Inficon
Crystal 12® Sensor
The INFICON Crystal 12 Sensor replaces its crystals automatically without interrupting your process, when partnered with the INFICON IC6 Thin Film Deposition Controller. Whenever a crystal becomes unstable or fails, IC6 signals the Crystal 12 sensor carousel to immediately rotate a new crystal into position, for continuous deposition rate monitoring. To further minimize downtime, crystals can be preloaded into a second optional carousel, which can then be quickly and easily exchanged with the carousel containing the exhausted crystals, minimizing the time the system is open.
Use Part Finder to select sensor configuration.
FEATURES
- Holds 12 crystals with robust, automatic switching to maximize process up-time
- Easy-to-remove carousel allows fast replacement of all 12 crystals
- Stable crystal temperature, because crystal switching is pneumatically-driven (competitive units use heat generating motors)
- Easy-to-remove front deposition shield protects the crystals and carousel from material accumulation, minimizing the need to remove entire sensor for maintenance
- Optional mounting-post kit can be user-modified to accommodate metric hardware
NOTE 1:
Auto Crystal Switch only with IC6, Cygnus 2, XTC/3M, XTC/3S, SQC-310, and SQC-310C.
NOTE 2:
The Crystal 12 Sensor requires the 750-420-G1 solenoid with orifice installed (IPN 059-0189, included in Crystal 12 ship kit).
NOTE 3:
All lengths are supported with IC6, Cygnus 2, XTC/3M, and XTC/3S. SQC-310 and SQC-310C support in-vacuum lengths up to 30.75" only.
NOTE 4:
Position feedback is not available with SQC-310 or SQC-310C.
1. Type of sensor
Includes User Manual. Crystals sold separately
2. In-Vacuum Cable Assembly Length
(see note 3)
3. Crystal Carousel Assembly
4. Front Deposition Shield
5. Mounting Post with Hardware
6. Solenoid Valve
(see note 2)