Electron Beam Gun Crucibles

Electron beam evaporation is a technique used for thin film deposition that employs an electron beam source, also known as an electron beam gun (EB gun). This device features a heated cathode that emits a high flux of electrons, which are accelerated by high voltage and directed into a water-cooled hearth using a magnetic system.

The material to be evaporated, referred to as the evaporant, is placed in a crucible within the hearth. The evaporant is heated to the point of vaporisation and then deposits onto a substrate, forming the desired thin film. Electron beam evaporation can achieve very high temperatures, allowing for rapid deposition rates and the evaporation of a broad range of materials. This method is precise, reproducible, and can be enhanced with an ion source to improve the performance characteristics of the resulting thin film.

Before the thin film deposition begins, the evaporant may need to undergo "conditioning." A shutter placed above the crucible remains closed while the evaporant is conditioned, degassed, and monitored for spitting tendencies. The extent of conditioning required depends on the material type, its quality, and its manufacturing process. Using high-quality thin film materials can minimize the conditioning process and increase the yield of successful thin films. High purity materials are specifically recommended for electron beam sources.

Testbourne offers electron beam source crucibles and pre-formed evaporant material cones that fit directly into these crucibles. Both crucibles and cones are available in various materials.

Refer to the Crucible Selection Table to choose the appropriate crucibles for specific materials and contact us with any questions.