Home Deposition Monitors IMM-100 Thin Film Deposition Monitor


IMM-100 Thin Film Deposition Monitor


Protect and Grow Your Profit with Precision Rate and Thickness Monitoring

IMM-100 is a deposition monitor built with ModeLock technology to maximize reproducibility and uniformity with the highest thickness accuracy, best measurement resolution, and lowest rate noise.

With the oscillator built-in IMM-100 can be easily integrated into an EtherCAT system with minimal hardware and footprint. This powerful and precise measurement monitor is sure to bring a new level of performance to your process.


  • INFICON ModeLock technology provides the longest crystal life and ensures the most stable, highest resolution rate and thickness measurement available, even at very low rates
  • Maximize yield with the best QCM thickness measurement possible
  • Single channel rate and thickness monitor without unnecessary added features to minimize cost
  • ±0.0035 Hz over 100 ms sample
  • EtherCAT communications for seamless integration
  • Compact size to minimize integration costs by saving tool real estate
  • Expert application support, able to discuss unique application needs and give greater support than the competition
  • RoHS compliant


  • OLED Applications
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IMM-100 Brochure
074-722-P1D IMM-100 Operating Manual.pdf
Thin Film Catalog 2021
Thin Film Catalog 2021 (Chinese)