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IC6 Thin Film Deposition Controller


Feature-Rich IC6 Provides the Best Measurement Precision Possible

The IC6 Thin Film Deposition Controller provides exceptional value by combining the proven performance of INFICON thin film controllers with unique features, all designed for you to achieve the most from your deposition process. The IC6 uses our ModeLock frequency measurement system to provide stable, high-resolution rate and thickness measurement with an industry-leading rate resolution of 0.00433 Å/s every 1/10 second. No other quartz crystal controller has the performance, quality and features of the IC6. Allowing you to make excellence repeatable.


  • INFICON ModeLock technology ensures the most stable, highest resolution rate and thickness measurement available, even at very low rates
  • Auto Z improves thickness accuracy by automatically determining the Z-ratio as material is deposited
  • Codeposition of up to six sources simultaneously
  • Color TFT LCD display makes it easy to see what's going on with your process
  • +/-0.0035 Hz over 100ms sample
  • USB data storage for screen shots, recipe storage and data logging
  • Powerful I/O with flexibility to integrate into simple or complex systems (using expandable Inputs (28) and Outputs (24 Relays, 14 TTL outputs), and use of logic functions (100 logic statements)
  • 6 DAC outputs standard, 6 additional optional for source control, rate or thickness monitoring
  • Can accommodate up to 50 processes of 200 layers each and processes can be linked together for a maximum of 10,000 layers
  • Multiple sensor averaging for up to 8 sensors
  • 4 meter XIU option provides the ability to use long in-vacuum sensor cables for large systems
  • Optional Ethernet communications
  • Optional IC6 Configuration Editor Software (part number 781-620-G1) - LabVIEW® based Windows® software that allows for offline creation and editing of IC6 configuration files and converts IC/5 configuration files to IC6 format.
  • RoHS compliant


High End Optical Coating

Your Part Number: IC6-

1. Basic Configuration
2. Sensor Measurement Module

(Each has 2 sensor inputs)

3. Additional Computer Communications Module

(RS232 standard)

4. Additional I/O Relay Module

(Base unit includes 8 Relay Outputs / 14 TTL Inputs)

5. Optional TTL Relay Module
6. Optional DAC Module

(Base unit includes 6 DAC Outputs)


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IC6 Thin Film Deposition Controller for Optical Application Brochure (English)
IC6 Thin Film Deposition Controller Operating Manual (English)
IC6 Thin Film Deposition Controller Operating Manual (Japanese)
074-380-P1C CrystalTwo Switch IS.pdf
Thin Film Catalog 2021
Thin Film Catalog 2021 (Chinese)
Application Note: Auto-Z: A Path to Precision Control of Layer Thinckness (English)
Technical Note: The Technology of the Intelligent Oscillator for Quartz Crystal Measurement and Advantages for Thin Film Processes (English)
Mass Determination with Piezoelectric Quartz Crystal Resonators (English)
Reducing Process Variation Through Multiple Point Crystal Sensor Monitoring (English)