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RSH-600 Rotary Sensor Head

Excellent Crystal Performance in Demanding Applications

RSH-600 Rotary Sensor Heads are designed for demanding processes, employing very thick films and several different materials. The RSH-600 holds six crystals in a thermally shielded, water-cooled housing, ensuring excellent crystal performance in temperature environments up to 300°C. Crystals are housed in an easy to remove Teflon® and stainless steel crystal holder.

Use Part Finder to select sensor configuration.


  • Six crystals
  • Position feedback (Controller dependent)
  • Adjustable length (with optional flange)
  • Rugged design
Your Part Number: 15320

Note 1:

Angled head adds 11 mm (0.4 in.) to in-vacuum length. (See the drawing on page 4.)

1. Type of Sensor
2. Length of Sensor

(in-vacuum length)

3. Voltage


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RSH-600 Sensor Datasheet (English)
RSH-600 Rotary Sensor Head Operating Manual (English)
Thin Film Catalog 2021
Thin Film Catalog 2021 (Chinese)
RSH-600 Cooling Efficiency (English)
Sensor Alignment (English)
Use of Maxtek Sensor Heads in a Sputtering Environment (English)