Reliable Control for Precision Thin Film Deposition

Reliable Control for Precision Thin Film Deposition with INFICON IMM-100, IMM-200 and Zevision® IMC300
As thin film technologies continue to advance, the margin for error in deposition processes becomes increasingly narrow. In applications such as optical coatings, semiconductor manufacturing and advanced electronic materials, angstrom-level control of deposition rate and film thickness is essential for achieving uniformity, repeatability and high yield. In this environment, in situ monitoring and control are no longer optional; they are fundamental process requirements.

INFICON’s IMM-100, IMM-200 and Zevision® IMC300 provide a complete portfolio of high-precision thin film deposition monitoring and control solutions, all built around INFICON’s proprietary ModeLock™ measurement technology. These systems are available through Testbourne, who also provide expert application support to ensure optimal integration and long-term performance.

The Importance of In Situ Thin Film Monitoring

Thin film deposition monitors provide real-time measurement of deposition rate and accumulated film thickness during physical vapor deposition (PVD) processes. Using quartz crystal microbalance (QCM) technology, material condensing on a quartz crystal causes a shift in resonant frequency that can be directly correlated to mass loading and film thickness.

Unlike post-process metrology, in situ monitoring enables manufacturers to:

• Detect and correct process drift in real time
• Improve thickness uniformity and reproducibility
• Reduce scrap, rework and consumable waste
• Increase process yield and throughput

IMM-100 Thin Film Deposition Monitor

The IMM-100 is a compact, single-channel thin film deposition monitor designed to deliver maximum thickness accuracy, best measurement resolution and lowest rate noise, even at very low deposition rates. With the oscillator built directly into the unit, the IMM-100 integrates easily into EtherCAT-based automation systems, minimising both hardware requirements and tool footprint.

At the core of the IMM-100 is INFICON ModeLock™ technology, which ensures stable oscillation at the crystal’s fundamental frequency throughout the deposition process. This stability dramatically improves measurement accuracy and extends usable crystal life.

Key features include:

• ModeLock™ measurement system
• ±0.0035 Hz resolution over a 100 ms sample
• Single-channel rate and thickness monitoring
• EtherCAT communications for seamless integration
• Compact design to conserve tool real estate
• Available in single-layer and multi-layer models

IMM-200 Thin Film Deposition Monitor

The IMM-200 provides the same high-performance measurement capability as the IMM-100 while offering Ethernet communication for flexible networking and data integration. This makes it well-suited to production environments where process data logging, traceability, or system-wide connectivity are required.

Optimised for precision and reliability, the IMM-200 delivers accurate thickness and rate measurement without unnecessary added features, keeping both integration complexity and cost to a minimum.

Key features include:

• ModeLock™ technology for stable, high-resolution measurement
• ±0.0035 Hz frequency resolution over 100 ms
• Single-channel operation
• Ethernet connectivity
• Extended crystal life and improved system uptime

How ModeLock™ Technology Improves Measurement Accuracy

Conventional QCM systems incorporate the quartz crystal as an active element of the oscillator circuit. As deposition proceeds and the crystal’s electrical characteristics change, oscillator stability can degrade, leading to mode-hopping, a loss of oscillation at the fundamental frequency or complete measurement failure.

INFICON’s ModeLock™ measurement system eliminates this limitation by continuously testing and analysing the phase–frequency relationship of the crystal. The crystal is not used as an active oscillator element, ensuring resonance at the fundamental frequency throughout the process. This approach delivers higher accuracy, lower noise and faster response than conventional methods.

INFICON Zevision® IMC300 Thin Film Deposition Controller

The INFICON Zevision® IMC300 extends beyond monitoring to deliver full thin film deposition control, specifically for advanced multilayer and optical coating applications.

Multi-Layer Compensation System

The IMC300 features a patented multi-layer compensation system that corrects thickness and rate calculations as multiple layers accumulate on the QCM crystal. By normalising the Z-ratio in the Z-match equation based on previously deposited layers, the system eliminates cumulative thickness error that typically increases over time. This enables in situ thickness accuracy that rivals optical monitoring, often eliminating the need for costly optical sensors or ex situ analysis.

Predictive Crystal Health and Temperature Compensation

The IMC300 also incorporates Predictive Crystal Health, evaluating whether a crystal can survive the full deposition before a process begins, reducing unexpected downtime. Built-in, patented temperature compensation removes thickness errors caused by thermal variation, without additional sensors or custom hardware, ensuring superior reproducibility.

Integration and Long-Term Support

Designed for fast integration, the IMC300 features a touchscreen interface, intuitive recipe building, backwards compatibility and optional multi-source operation. Firmware updates, hardware upgrades and optional after-care plans ensure long-term reliability and ease of ownership.

Reliable Control for Precision Thin Film Deposition

Achieving consistent, high-quality thin films requires accurate measurement, stable control and deep process understanding. INFICON’s IMM-100 and IMM-200 deliver industry-leading in situ rate and thickness monitoring, while the Zevision® IMC300 provides advanced multilayer deposition control for the most demanding applications.

All three solutions are available through Testbourne, who offer not only supply but also expert technical and application support, helping customers select the right system, integrate it effectively and maximise performance over the lifetime of the tool. Together, INFICON technology and Testbourne expertise provide a trusted foundation for reliable, high-precision thin film deposition.