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Deposition Controllers

INFICON market-leading thin film deposition controllers, monitors and QCM measurement instruments control deposition rate and thickness of the most complex processes with unsurpassed measurement speed and precision. Enhanced software and logic I/O features allow our thin film deposition controllers/QCM measurement instruments to be fully integrated into the vacuum system for automatic process control. To control less complex processes, use INFICON economical, precision controllers, monitors and QCM measurement instruments that measure films with 100 times more precision than conventional techniques.

The typical QCM system includes a quartz crystal which is the sensing device, a crystal holder (sensor) which holds the crystal and provides electrical connections to the crystal, an oscillator (or XIU for ModeLock instruments) which drives the crystal, and a controller or monitor that reads the deposition rate and thickness and stores process parameters. INFICON provides both complete QCM systems as well as individual components designed for research applications.

From the simplest to the most complex process, INFICON provides superior value.

       
3501 XTC/3 Inficon Tkn Film Deposition Controller 230
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603200 RQCM Research Quartz Crystal Microbalance 3.8 to 6.0 MHz
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603200-1-2 RQCM Research Quartz Crystal Microbalance 3.8 to 6.0 MHz 220V
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603200-1-3 RQCM Research Quartz Crystal Microbalance 3.8 to 6.0 MHz 240V
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603200-2 RQCM Research Quartz Crystal Microbalance 5.1 to 10.0 MHz
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622200 MDC-260 Deposition Controller (Half rack Case)
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622200-2 MDC-260 Deposition Controller (Full-rack mount Case)
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780-032-G1 XTC/3M or XTC/3S Editor / Monitor Software on CD
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780-038-G1 XTC/3M or XTC/3S Communications Library (DLL) onCD
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