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Easy Rate Single Sensor

Easy Rate Single Sensors are designed and manufactured to provide a cost effective solution to high-accuracy thickness monitoring for short optical and batch coating processes. 

This sensor minimizes production cost with the lowest initial investment and total cost of ownership. It is also designed to maximize availability through a long-lasting sensor that has less maintenance.

Easy Rate Single Sensors are available in standard and right angle orientations, and they can be configured to include a feedthrough with or without bored-through tube fittings.

Note: Easy Rate Single sensors use 4.8 mm (3/16 in.) outer diameter (OD) water cooling tubes.  They are not compatible with Ultra-Torr equipped Front Load Sensor feedthroughs and require a tubing adapter in order to be welded to a standard feedthrough with 4.8 mm (3/16 in.) OD water cooling tubes.

Use Part Finder to select sensor configuration.

FEATURES

  • Minimum investment with lowest upfront cost
  • Lowest total cost of ownership from extended sensor life
  • Maximum throughput with less maintenance
  • Easy installation
  • Available in standard and right angle configurations
  • Optional shutter available
  • Sensor / Feedthrough combinations available with or without bored-through tube fittings
Your Part Number: ERS-
X X X X X X

NOTE 1:
Shutter not available for Right Angle Single Sensor.

NOTE 2:
Crystals sold separately.

NOTE 3:
Sensor length is measured from centre of crystal to the end of the water tubes (see drawings).

1. Type of sensor
2. In-vacuum cable
3. Shutter assembly

(See note 1)

4. Length of sensor

(See note 3)

5. Feedthrough
6. Feedthrough connection

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Easy Rate Single Sensor Datasheet (English)
Easy Rate Single Sensor Datasheet (Chinese)
Instruction Sheet: Easy Rate Sensor
Easy Rate Sensor Instruction Sheet (Chinese)
Thin Film Catalog 2021
Thin Film Catalog 2021 (Chinese)