ALD Sensor

ALD Sensor

Manufacturer: INFICON

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OPTIMUM ACCURACY, UPTIME AND MINIMAL MAINTENANCE FOR ALD APPLICATIONS

INFICON ALD Sensors bring the repeatability, precision and durability of quartz crystal microbalance (QCM) measurement to atomic layer deposition (ALD). The ALD Sensor can withstand temperatures up to 450ºC, and is designed to operate in the harsh environment of an ALD application. The exposed crystal electrode is fully grounded to effectively eliminate any potential issues with electrical interference.

Designed Specifically for ALD
A unique feature of the INFICON ALD sensor is a gas tube used to purge the back of the crystal and sensor cavity with an inert gas, typically nitrogen. This keeps reactive chamber gases from entering the sensor head and keeps the back of the crystal and electrical contacts free of deposition material. This technique allows for in situ measurement in systems where a standard QCM is not suitable.

Feedthrough and Feedthrough Connection
INFICON ALD Sensors are available in custom welded lengths or with compression fittings for adjustable length without the need for brazing or welding. All configurations use a 2 ¾ in. (CF40) ConFlat® flange feedthrough.

High Temperature Crystals for More Accurate Measurements
The INFICON ALD Sensor can achieve the best measurement accuracy and lower frequency noise in high temperature applications when used with INFICON’s new high temperature quartz crystals. These high temperature crystals are optimized for 120, 240, and 285°C applications, so you always have the right crystal for your process. Crystals optimized for other temperatures may be available. Contact INFICON for your needs.

Benefits

  • Compatible with most ALD process temperatures
  • Significantly reduces maintenance
  • Maximizes system uptime
  • Maximizes measurement accuracy
  • Stable readings with low noise at high process temperatures

Features

  • Operating temperature up to 450°C
  • Gas purge line keeps back of crystal free of depsotion material
  • Welded Conflat flange (CF40) option
  • O-ring compression fitting option
  • High temperature crystals available

Typical Applications

  • Atomic Layer Deposition (ALD)