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4 inch diameter Silicon Carbide (SiC)<\/sub> Substrate<\/h2>\r\n\t\t\t\t\t

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Grade<\/th>Production Grade<\/b><\/td>Research Grade<\/b><\/td>Dummy Grade<\/b><\/td><\/tr>
Diameter<\/th>100.0 mm\u00b10.5 mm<\/td><\/tr>
Thickness<\/th>350 \u03bcm\u00b125\u03bcm<\/td><\/tr>
Wafer Orientation<\/th>On axis : <0001>\u00b10.5\u00b0 Off axis : 4.0 toward \u00b10.5\u00b0<\/td><\/tr>
Primary Flat<\/th>{10-10}\u00b15.0\u00b0<\/td><\/tr>
Primary Flat Length<\/th>32.5 mm\u00b12.0 mm<\/td><\/tr>
Secondary Flat Length<\/th>18.0mm\u00b12.0 mm<\/td><\/tr>
Secondary Flat Orientation<\/th>Si-face:90\u00b0 cw. from orientation flat \u00b1 5\u00b0\/C-face:90\u00b0 ccw. from orientation flat \u00b1 5\u00b0<\/td><\/tr>
Edge exclusion<\/th>3 mm<\/td><\/tr>
TTV\/Bow \/Warp<\/th>\u226445\u03bcm \/\u226445\u03bcm \/\u226445\u03bcm<\/td><\/tr>
Micropipe Density<\/th>\u226410 cm-2<\/td>\u226430 cm-2<\/td>\u2264100 cm-2<\/td><\/tr>
FWHM<\/th>\uff1c30 arcsec<\/td>\uff1c50 arcsec<\/td>\u65e0\u8981\u6c42 N\/A<\/td><\/tr>
Resistivity<\/th>4H-N 0.01\u03a9\u00b7cm ~0.03 \u03a9\u00b7cm<\/td>4H-N 0.01\u03a9\u00b7cm ~0.1\u03a9\u00b7cm<\/td>4H-N 0.01\u03a9\u00b7cm ~0.1\u03a9\u00b7cm<\/td><\/tr>
Roughness<\/th>Polish Ra\u22641 nm
CMP Ra\u22640.5 nm<\/td>
Polish Ra\u22641 nm
CMP Ra\u22640.5 nm<\/td>
N\/A
N\/A<\/td><\/tr>
Cracks by high intensity light<\/th>Edge<1mm<\/td>Edge1-2mm<\/td>Cumulative length\u226410mm; single length\u22642mm<\/td><\/tr>
Hex Plants by high intensity light<\/th>6 allowed \u2264100 microns each<\/td>12 allowed \u2264300 microns each<\/td>Cumulative area\u226430%<\/td><\/tr>
Polytype Areas by high intensity light<\/th>None<\/td>Cumulative area\u22642 %<\/td>Cumulative area\u226410%<\/td><\/tr>
Scratches by high intensity light<\/th>None<\/td>None<\/td>8 scratches to 1\u00d7wafer diameter cumulative length<\/td><\/tr>
Contamination by high intensity light<\/th>None<\/td>None<\/td>None<\/td><\/tr>
Usable area\r\n<\/th>\u226590%<\/td>\u226580%<\/td>\u226570%<\/td><\/tr>\r\n\t\t\t\t\t\t\t\t<\/tbody>\r\n\t\t\t\t\t\t\t<\/table>\r\n\t\t\t\t\t\t\r\n\t\t\t\t\t
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