8 Aura-Wave ECR coaxial plasma sources distributed
for the production of a large volume of plasma,
Argon, 10-2 mbar, 20 W/source
Microwave technology is continuously finding new applications in plasma laboratories and industries due to the many advantages of microwave plasmas, e.g. particularly dense plasma - ions and active species, electrode less, operation over a wide range of pressures. Microwave-assisted plasmas find applications in diamond deposition, surface activation, sterilization, synthesis of nanomaterials, gas cleaning etc.
To meet the more and more demanding requirements demanded by such sophisticated technologies SAIREM has developed its own range of plasma sources and reactors.

SAIREM can offer advice on choosing the plasma equipment and the microwave frequency adapted to your needs; special configurations are also available upon request. SAIREM’s R & D team will be happy to help developing equipment specific to your application.
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