FEATURES
- Automatically initiates crystal switching,
Time/Power, or Abort upon crystal failure.
- Real time graphing of Rate, Rate deviation,
Thickness and Power.
- Compact 3-1/2" full rack case.
- Up to 16 fully programmable discrete inputs
and outputs for system interfacing.
- Dynamic Measurement Update for optimum
resolution and control.
- Supports input from optical monitor for
optical termination of film thickness.
- Fully isolated source control voltage.
- Optional 20,000 run-time data point storage
with real time clock to provide time and date stamp.
- Supports multiple rate ramps, as many as
four, and rate establish prior to shutter opening
- Resume process from abort
- Audible attention, warning and alarm signals
with adjustable volume, for trouble and routine operator call.
The MDC-360 is a flexible, powerful
state-of-the-art deposition controller. The MDC-360 is capable of
controlling up to four single or multi-pocket sources; controlling and
interfacing with up to four single, dual or multi-crystal sensor heads, storage
for 99 processes, 999 layers and 32 complete material definitions.
Some of the more unique features of the
MDC-360 include support for 2.5, 3.0, 5.0, 6.0, 9.0 & 10.0 MHz sensor
crystals, user named processes, materials, inputs and outputs, a three level
audible alarm and resume from abort.
The MDC-360 also includes very powerful
programmable inputs, outputs and actions which allow the 360 to control various
system components such as substrate heaters, pocket rotators, planetary
rotators, etc.
The MDC-360 is fully supported by
Deposition Control Manager Windows based software (DCM-200). This PC software
streamlines the setup, debugging and fine tuning of complex processes and
systems. It allows complete archiving of process, system and run time data.
