Invoil® 46 is a synthetic hydrocarbon fluid (arylalkyldiphenylether) for diffusion pumps whose performance combines the best properties of silicones and polyphenyl ethers. It was developed to accommodate the performance requirements of applications such as CRT evacuation, optical coatings, evaporation and sputtering, vacuum metallurgy, leak detection, and mass spectrometry.
As a result of its unique chemical structure, Invoil 46 offers excellent thermal stability and radiation resistance, and can attain untrapped pressures reaching 1×10-8 torr. Its ability to recover from accidental exposure to atmosphere during normal operation is comparable to that of silicone diffusion pump fluids. In addition, deposits formed in the event of ionization or breakdown of the fluid are conductive and do not accumulate static charges.
|Vapor Pressure at 25ºC (torr)||<1x10-8|
|Boiling Point at .01 torr (ºC)||129|
|Viscosity at 40ºC (cSt)||65|
|Viscosity at 100ºC (cSt)||9|
|Pour Point (ºC)||-20|
|Flash Point (ºC)||260|
|Fire Point (ºC)||None|
|Density at 25ºC (g/ml)||0.9|