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Invoil Silicone Diffusion Pump Oil – 702, 704, 705

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Inland Vacuum’s silicone diffusion pump oils – Invoil 702, 704, and 705 – are durable fluids designed for a variety of high vacuum applications and for fast pumping large volumes of gas. They are direct equivalents to the DOW CORNING® DC-702, 704, and 705 silicone fluids, respectively, and are completely miscible and have the same chemical and physical properties.

Properties High thermal stability

Highly pure silicone fluids absent of volatile or unstable contaminants
Flash points well above normal diffusion pump operating temperatures
No fire point
Suitable for continuous pumping of oxygen and for regular venting of hot systems to atmospheric pressure

Radiation resistance

High phenyl content allows for excellent resistance to gamma radiation
Small viscosity changes when exposed to radiation

Chemical resistance

Chemically inert silicone fluids for longer service life without contamination of degradation
Will not breakdown or deteriorate as a result of chemical exposure

Low to ultra-low vapor pressure

Invoil 704 and 705 capable of attaining vapor pressure of 10-11 torr with trap
Invoil 705 has vapor pressure of 2.4×10-9 torr at 25°C
Invoil 704 has vapor pressure of 2×10-8 torr at 25°C

Minimal backstreaming

Invoil 705’s extremely low vapor pressure allows for ultra-clean vacuum system
Contamination rates close to 0 because of ultra-high vacuum achieved

Oxidation resistance

Does not react with metal parts and seals in vacuum system
Will not be oxidized by air at operating temperatures
Will not undergo hydrolysis by water vapor

Invoil silicone diffusion pump oil is designed to meet the increasingly demanding and diversifying needs of multiple industries.

Areas of Application

Chemical and physical vapor deposition
Thin film sputtering and evaporation
Evacuating power and microwave tubes
Electron, vacuum, and cathode-ray tubes

Optical coating
Architectural glass and materials coating
Decorative coating

Thick film deposition
Plasma and electronic beam welding
Melting, refining, and atomizing

Surface and materials analysis
Mass spectrometry
Spectroscopy, microscopy, and tomography
Particle acceleration and gravitational wave detection

Specifications
Specifications	Invoil 702	Invoil 704	Invoil 705	Invoil 940
Vapor Pressure at 25ºC (torr)	3.3x10-6	2x10-8	2.4x10-9	2x10-8
Boiling Point at .5 torr (ºC)	190	210	243	221
Viscosity at 40ºC (cSt)	26.8	24.2	66	24.2
Viscosity at 100ºC (cSt)	6.2	6.2	9.8	6.2
Pour Point (ºC)	<0	<-9	<0	<-9
Flash Point (ºC)	193	221	243	221
Fire Point (ºC)	None	None	None	None
Density at 25ºC (g/ml)	1.07	1.07	1.09	1.07

Products
Description	Part No.	Price on request
Invoil 702 is designed for rapid pumping of large volumes of gas and has the important advantages of thermal stability and oxidation resistance. This silicone-based fluid is resistant to air at operating temperatures, the pumps require no cooling between cycles.	Invoil® 702
Invoil 704 is a silicone diffusion pump oil with low vapor pressure and great thermal stability, making it desirable in processes such as vacuum coating, metallurgical work, and various other applications. It offers superior vapor pressure capabilities and quick pump down cycles.	Invoil® 704
Invoil 705, with a higher viscosity than the other Invoil fluids, is designed to produce an ultra-high and ultra clean vacuum. With the use of traps, Invoil 705 is capable of attaining a pressure of 10-11 torr, and without a trap 10-9 torr.	Invoil® 705
Invoil 940 is a silicone diffusion pump fluid with both low vapor pressure and thermal stability, enabling it to be used in vacuum coating, metallurgical work, and various other applications. It is oxidation and explosion resistant, and offers quick pump down cycles.	Invoil® 940

Invoil Silicone Diffusion Pump Oil – 702, 704, 705

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