Surfaguide

The use of this kind of applicators requires two adaptation components : a short-circuit, and a microwave adapter as indicated below : The system may be cooled : surfaguide itself (strong air flow), or plasma column (air cooling, or jacketing or oil circulation cooling).

Performances :

Creation of plasmas of various lengths, symmetric or not regarding the applicator.
Plasma diameter from 0.1 up to 20 cm.
Transferred power from a few Watts to 6 kW at 2,450 MHz.
Working pressure between 10"5 and several bars.

Applications :

Light sources (mercury lamps).
Neutral active species source (excited atoms or molecules, ...)
Sources for surface treatment reactors (textile, cars manufacturing, luxury industry), reactors for chemistry, deposition, etching, stripping (microelectronics) reactors.