Downstream Source

SAIREM downstream microwave sources are used by research scientists and OEM's in a variety of applications, for example, etching, deposition, diamond films, surface treatment, optical coating, oxygen dosing, etc ...

The SAIREM downstream source generates a net neutral plasma, the characteristics of which are dependent on chamber pressure, gas type and absorbed microwave power

Since plasma density and ion recombination are affected by pressure and system geometries, the nature of the species arriving at the treatment area is also dependent on these factors.

2 standard models are availables (quartz tube 0:10 mm to 50 mm)

MODEL 1 : compact downstream source
It includes a graduated 3-stub tuner, a downstream source and a sliding short-circuit.

MODEL 2 : downstream source in separate parts

Same model as model 1 but every part can be easily dismantled.

We also produce downstream sources for larger quartz tubes: ext. diam. 60 - 80 -100 mm and more.

Main features :

* chimneys at each end of the guide can be dismantled. This makes it possible to use different quartz tubes without changing the downstream source. The quartz tube diameters can vary between 10 mm and 50 mm inside the downstream source.

* 2 windows at each end of the guide enable plasma visualization.

The SAIREM downstream microwave systems employ highly regulated, low ripple (< 1%) power supplies designed for reproduceable downstream processing.

Units are available ranging in size from 300 W to 6 kW.

The versatility of these systems allows a wide variety of eventual configurations. Custom interfaces, quartz tube microwave shielding/cooling and ancillary components are also available.

Note : quartz tubes are not provided as part of the system.

For further information please contact our headquarters or your local SAIREM representative.