Inficon/Maxtek - Thin Film Measurement

Thin Film Deposition Monitor & Controllers

Deposition controllers provide automatic rate control of single or multi-layer film depositions. They have the ability to control many of the vacuum systems peripherals such as multi-pocket indexers, source shutters, gas valves, etc. They are typically used in production systems.

Monitors simply measure the deposition rate and thickness but do not provide rate control. They are typically used in development systems with manual control. They are also used in sputtering where rate control is not required.

• Maxtek TM-400 Multi-Film Deposition Monitor
• Cygnus Thin Film Deposition Controller
• IC/5 Thin Film Deposition Controller
• Maxtek MDC-360C Thin Film Averaging Controller
• Maxtek MDC-361C Thin Film Averaging Controller
• Maxtek MDC-260 Thin Film Deposition Controller
• XTC/3 Thin Film Deposition Controller
• Maxtek DCM-250 Windows-Based Deposition Control Software

High Vacuum Equipment Accessories

• Sensor Heads and Feedthrough Packages
• Electron Beam Gun Crucible Indexer
• Maxtek SO-100 Sensor Oscillator
• Maxtek PLO-10i Phase Lock Oscillator

Research Applications of Thin Films in Gases or Liquids

RQCM is a highly advanced method of measuring film properties during processes such as deposition, dissolution or permeation. Real-Time Frequency, Mass and Resistance Measurement.

• Maxtek RQCM Quartz Crystal Microbalance Research System