Deposition controllers provide automatic rate control of single or multi-layer film depositions. They have the ability to control many of the vacuum systems peripherals such as multi-pocket indexers, source shutters, gas valves, etc. They are typically used in production systems.
Monitors simply measure the deposition rate and thickness but do not provide rate control. They are typically used in development systems with manual control. They are also used in sputtering where rate control is not required.
RQCM is a highly advanced method of measuring film properties during processes such as deposition, dissolution or permeation. Real-Time Frequency, Mass and Resistance Measurement.