CDG025D Capacitance Diaphragm Gauge

The SKY CDG025D Capacitance Diaphragm Gauge line of highly accurate, temperature compensated manometers is designed for stable performance in harsh manufacturing tool environments. Advanced digital electronics improve the gauge's performance and offer features such as one push button zero function and set point adjustment. The corrosion resistant ultra pure ceramic sensor provides excellent zero stability with a long life expectancy of several million pressure cycles, including atmospheric bursts. The unique sensor shield (patent pending) protects the gauge from process contamination. A robust mechanical design and digital electronics improve EMC compatibility, long term stability and temperature compensation. The CDG025D Capacitance Diaphragm Gauge sets new standards for fast stability after power on and fast recovery from atmospheric pressure exposure.

Features at a Glance

• Full scale ranges from 100 mTorr to 1000 Torr
• Fast stability after power on
• Fast recovery from atmospheric pressure
• Corrosion resistant ceramic sensor
• Excellent long term signal stability
• Temperature compensated
• Sensor protected from contamination
• One push button zero function
• Wide range power supply
• 2 set points (optional)
• RS232 interface (optional)

Applications

• Semiconductor manufacturing equipment for Etch, CVD, PVD, ALD
• Data storage and display manufacturing equipment
• Industrial vacuum equipment
• General high accuracy pressure measurement

ASSOCIATED TECHNICAL INFORMATION

Brochures and Datasheets:

Datasheet - CDG025D SKY Capacitance Diaphragm Gauge

Datasheet - CDG025D-X3 SKY Capacitance Diaphragm Gauge

Operations and Maintenance Manuals:

Operating Manual - CDG025D

Technical Information:

On the Stability of Capacitance-Diaphragm Gauges with Ceramic Membranes - JVST Jan/Feb 2011