HPG400 High Pressure Ionization
Pirani Gauge

The INFICON High Pressure Hot Ionization Pirani Gauge, HPG400, combines High Pressure Hot Ionization and Pirani sensors in a single, compact, economical package to measure pressure from 2 X 10 -6 to atmosphere (1.5 X 10 -6 to atmosphere). The HPG400 provides highly repeatable and reproducible pressure measurement for accurate sputter process pressure control.

Advantages

• HPG400 saves cost and tool space and reduces the complexity of vacuum system installation and setup
• The high pressure hot ion gauge delivers accurate, reliable pressure measurements from 1 X 10 -5 ... 1 mbar for improved process control
• User selectable hot ion emission activation between 5 X 10 -2 and 1 mbar
• Pirani interlock protects the hot filament from premature burnout
• Optional graphic display and Fieldbus interfaces available
• Automatic high vacuum Pirani adjustment reduces operator interventions

Applications

• Sputter applications in semiconductor manufacturing, electronics and media industry
• Industrial coating
• General vacuum measurement and control in the low to high vacuum range

ASSOCIATED TECHNICAL INFORMATION

Brochures and Datasheets:

Datasheet - HPG400, HPG400-SD, HPG400-SP

Operations and Maintenance Manuals:

Communication Protocol - BPG400-SD, HPG400-SD

Communication Protocol - BPG400-SP, HPG400-SP

EDS for HPG400 with Float EDS

EDS for HPG400 with Integer EDS

GSD for HPG400

Instruction Sheet - HPG400, HPG400-SD, HP400-SP

Instruction Sheet - HPG400, HPG400-SD, HPG400-SP

Operating Manual - HPG400, HPG400-SD, HPG400-SP