CDG025 AllCeramic Capacitance Diaphragm
Gauge

All vacuum exposed surfaces of the SKY AllCeramic CDG are constructed of ultra-pure aluminum oxide ceramic, replacing the stainless steel tubing of our traditional CDG. This product is preferred in applications where metal contamination must be avoided.

Advantages

• No metal contamination
• Marginal zero drift
• Virtually corrosion proof - long sensor life results in reduced downtime thus reducing cost of ownership
• Superior accuracy and repeatability over long periods of operation
• Better long term and temperature stability
• Eliminates isolation valve (depending on operation mode)
• Less susceptible to particles and process by-products due to suprashield
• Fastest warm-up time
• Lower cost of investment
• Drop-in replacement of existing CDGs due to interface compatibility

Applications

• Etch, CVD and PVD processes
• Doping silicon using implantation or diffusion processes
• Oxidation
• Creation of gate oxide layer in the range of 100
• Creation of barrier layers (Ti, TiN, Ta and TaN as a protection layer between Silicon and Aluminum or Copper

ASSOCIATED TECHNICAL INFORMATION

Brochures and Datasheets:

Datasheet - CDG025-C

Operations and Maintenance Manuals:

Operating Manual - CDG025-C

Technical Information:

On the Stability of Capacitance-Diaphragm Gauges with Ceramic Membranes - JVST Jan/Feb 2011