CDG160 AllCeramic Capacitance Diaphragm
Gauge

The INFICON SKY AllCeramic CDG160A-C is the only completely metal-free 160 o C temperature controlled capacitance diaphragm gauge designed for demanding applications, such as oxidation, diffusion and LPCVD. All surfaces exposed to the vacuum such as tubing, plasma shield and contamination protection shield are composed of corrosion-resistant ultra pure aluminum oxide ceramic eliminating potential metal contamination from the gauge. The INFICON SKY AllCeramic CDG160A-C integrates the proven sensor technology of the INFICON CDG160A series of gauges for reliable and repeatable performance in LPCVD and other harsh semiconductor manufacturing applications.

Advantages

• Metal-free ultra pure ceramic design prevents metal contamination
• Temperature controlled to 160 o C prevents condensation or process products and by-products
• Compact design saves valuable space and simplifies tool integration
• High ambient temperature compatibility
• Enhanced particle protection chamber with an additional protection shield (Suprashield) reduces the probability of gauge contamination
• Unique ceramic sensor design provides repeatability and accurate measurements with excellent long-term stability
• Optional set point and status indication provides additional control and safety functions

Applications

• Oxidation, diffusion and LPCVD processes
• Other metal free vacuum measurement requirements

ASSOCIATED TECHNICAL INFORMATION

Technical Information:

On the Stability of Capacitance-Diaphragm Gauges with Ceramic Membranes - JVST Jan/Feb 2011