BCG450 TripleGauge Bayard-Alpert Pirani Capacitance
Diaphragm Gauge

The INFICON Bayard-Alpert Pirani Capacitance Diaphragm Gauge, BCG450, combines the advantages of three different technologies in a single, compact, economical package to measure process and base pressure from 5 X 10 -10 to 1500 mbar (3.75 X 10 -10 to 1125 Torr). The BCG450 is designed to take the place of three sensors (hot ion, convection enhanced Pirani and vacuum switch), thus reducing cost and valuable tool space.

Advantages

• BCG450 saves cost and tool space and reduces the complexity of vacuum measurement installation and setup
• Gas-type-independent pressure measurement above 10 Torr provides more reliable loadlock control for any gas mixture
• Pirani interlock protects the hot filament from premature burnout
• Automatic high vacuum and atmospheric Pirani adjustment reduces operator interventions
• Differential pressure measurement at atmosphere eliminates uncertainty related to atmospheric pressure changes
• Easy-to-exchange sensing element with on-board calibration data guarantees reproducibility
• Optional graphic display and Fieldbus interfaces available

Applications

• Pressure measurement in semiconductor process, transfer and loadlock chambers
• Industrial coating
• General vacuum measurement and control on systems in the low to ultra high vacuum range

ASSOCIATED TECHNICAL INFORMATION

Brochures and Datasheets:

Datasheet - BCG450

Operations and Maintenance Manuals:

Communication Protocol - BCG450-SD DeviceNet

Communication Protocol - BCG450-SP Profibus

EDS for BCG450 with Float EDS

EDS for BCG450 with Integer EDS

GSD for BCG450

Instruction Sheet - BCG450, BCG450-SD, BCG450-SP

Instruction Sheet - BCG450, BCG450-SD, BCG450-SP

Operating Manual - BCG450, BCG450-SD, BCG450-SP