Sputtering Sensor

The INFICON Sputtering Sensor is specifically designed for use in any sputtering process. The sensor body and cooling tubes are gold plated beryllium copper for maximum cooling efficiency in the sputtering environment. A magnet built into the sensor head reduces excessive heating by energetic free electrons in sputtering systems by deflecting them with the external magnetic field. The rear loading crystal holder design allows easy crystal replacement without having to remove the sensor head from the system.

Features at a Glance

• Gold plated beryllium copper sensor body and cooling tubes for maximum cooling efficiency
• Magnet to deflect free electrons away from the monitor crystal
• Easy installation with bendable water tubes allowing flexibility in sensor placement
• Rear load crystal insertion for easy crystal replacement

ASSOCIATED TECHNICAL INFORMATION

Brochures and Datasheets:

Datasheet - Sputtering Sensor