IC6 Thin Film Deposition Controller

MAKING EXCELLENCE REPEATABLE Feature-Rich IC6 Provides the Best Measurement Precision Possible

Learn more about the IC6 for Optical Applications

Crystal 12 - Replaces crystals automatically without interrupting your process.

The IC6 Thin Film Deposition Controller provides exceptional value by combining the proven performance of INFICON thin film controllers with unique features, all designed for you to achieve the most from your position process. The IC6 uses our ModeLock frequency measurement system to provide stable, high-resolution rate and thickness measurement with an industry-leading rate resolution of .00433 A/s every 1/10 second. No other quartz crystal controller has the performance, quality, and features of the IC6, allowing you to make excellence repeatable.

Features at a Glance

• INFICON ModeLock technology ensures the most stable, highest resolution rate and thickness measurement available, even at very low rates.
• Auto Z improves thickness accuracy b automatically determining the Z-ratio as material is deposited
• Up to six sources can be controlled simultaneously, independently or in any combination by one IC6, relieving the need for two or three controllers
• Color TFT LCD display makes it easy to see what's going on with your process
• 10 Hz measurement
• +/-0.0035 Hz over 100ms sample
• USB data storage for screen shots, recipe storage and data logging
• Thickness summing of multiple sources
• Measurement rate averaging for low density, very low rate materials (up to 30 seconds for use with stable sources for very low rate OLED dopant material deposition)
• Display rate resolution of up to 0.001/s
• 4 meter XIU option provides the ability to use long in-vacuum sensor cables for large systems
• Non-deposit control allows for continuous source control as substrates are cycled through the deposition chamber
• 6 DAC outputs standard, 6 additional optional for source control, rate or thickness monitoring
• Optional Ethernet communications
• RoHS compliant

ASSOCIATED TECHNICAL INFORMATION

Brochures and Datasheets:

Brochure - Crystal 12 Sensor for Quartz Crystal Deposition Controllers

Brochure - IC6 Thin Film Deposition Controller for Optical Applications

Catalogs:

Catalog - Thin Film Deposition Controllers, Monitors and Accessories

Operations and Maintenance Manuals:

Operating Manual - IC6 Thin Film Deposition Controller

Technical Information:

Application Note - Auto-Z: A Path to Precise Control of Layer Thickness

Mass Determination with Piezoelectric Quartz Crystal Resonators

Reducing Process Variation Through Multiple Point Crystal Sensor Monitoring

Technical Note - The Technology of the Intelligent Oscillator for Quartz Crystal Measurement and Advantages for Thin Film Processes