Crystal 12 Sensor

The INFICON Crystal 12 Sensor is critical for long processes demanding continuous rate control. Whether an OLED, MBE, Solar or other process having an extended period between chamber venting, the Crystal 12 sensor offers the security of 12 quartz monitor crystals in one sensor head. When used with Cygnus, XTC/3M, XTC/3S, SQC310 or SQC310C, the Crystal 12 automatically rotates a new crystal into position whenever the current crystal fails or becomes unstable. Crystals are automatically replaced without interrupting your process for continuous deposition rate monitoring. To further minimize downtime, crystals can be preloaded into a second optional carousel, which can then be quickly and easily exchanged with the carousel containing the exhausted crystals, minimizing the time the system is open. Crystal indexing is accomplished with a pneumatically driven mechanism. This pneumatically driven motor provides better thermal stability than competitive units using expensive in-vacuum, heat generating, electric motors. One-eighth inch water cooling tubes keep the sensor head thermally stable and allow flexibility in sensor placement.

Features at a Glance

• Holds 12 crystals with robust, automatic switching to maximize process uptime
• Easy-to-remove carousel allows fast replacement of all 12 crystals
• Stable crystal temperature, because crystal switching is pneumatically-driven (competitive units use heat generating motors)
• Easy-to-remove front deposition shield protects the crystals and carousel from material accumulation, minimizing the need to remove entire sensor for maintenance
• Optional mounting-post kit can be user-modified to accommodate metric hardware
• Optional crystal shutter available

ASSOCIATED TECHNICAL INFORMATION

Brochures and Datasheets:

Datasheet - Crystal 12 Sensor