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SQC310 Series Thin Film
Deposition Controllers

Highly Accurate Sequential or Co-Deposition Control


With advanced electronics, an improved display, and a very affordable price, the INFICON SQC310 Series gives you features not found on competitors' thin film controllers. And you can choose the ideal model for your application: sequential deposition (SQC310) or co-deposition (SQC310C).

Features at a Glance

  • Bright 1/4 VGA active matrix color LCD display - available in English or Chinese
  • Standard RS-232 and USB (with Ethernet option)
  • Easy setup and operation with a "Quick Setup" Menu, 6 context-sensitive push buttons, and convenient parameter setting knob
  • Windows® program for developing, testing, and downloading processes, and for logging instrument data to your PC for process analysis and quality control
  • Accurate process control, especially for low deposition rates, with ±0.03 Hz resolution at 10 readings/second, and with ± 2 ppm frequency stability over 0 to 50°C
  • Storage capacity for up to 100 processes, 1,000 layers, 50 films
  • Monitoring of source material with a single sensor or with multiple sensors to provide accurate source distribution monitoring
  • INFICON is the only manufacturer of thin film deposition controllers with local service and technical support around the world-including a broad selection of sensors, feedthroughs, and accessories to complement the SQC310 Series controllers. When you purchase your SQC310 series instrument-or any other INFICON product-you can be assured of fast answers, attentive service, and maximim uptime.




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