Cygnus Thin Film Deposition Controller

Cygnus™ Thin Film Deposition Controller maximizes process capability and flexibility for OLED (Organic Light-Emitting Diode) applications in the production of flat panel displays. Cygnus is unique in its ability to precisely control the ratios of up to six materials independently, or in any combination, with a rate resolution of 0.001 Å per second. This accuracy, powered by ModeLock - the patented INFICON quartz crystal measurement technology, is critical to the low-density materials and low deposition rates associated with OLED processes. As substrates are cycled through the system, flexible deposition sequencing allows continuous rate control and saves valuable production time by eliminating the need to reheat source material with every substrate.

Automatic Z-ratio determination, or Auto Z, increases the accuracy of thickness and rate control and eliminates the need for the user to estimate the acoustic impedance (Z) ratio. This is especially important for maintaining thickness and rate accuracy for materials where the Z-ratio is not known.

Extensive logic I/O features provide comprehensive process control integration. Cygnus also offers up to three digital to analog outputs per source A source power, rate, and thickness. The user can identify the true thickness deposited on the substrate from multiple sources through the Cygnus thickness-summing feature. Applications software provides complete programming of one or multiple Cygnus controllers from a PC, using RS232 or IEEE interface.

ASSOCIATED TECHNICAL INFORMATION:

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• Brochure - Crystal 12 Sensor for Quartz Crystal Deposition Controllers
• Brochure - Cygnus Thin Film Deposition Controller
• Brochure - Thin Film Family Brochure