BPG400 Bayard-Alpert Pirani Gauge

The INFICON Bayard-Alpert Pirani Combination Gauge, BPG400, functions as two gauges in a single compact unit measuring from 5 X 10 -10 mbar to atmosphere (3.8 X 10 -10 Torr to atmosphere). Combining technologies reduces the complexity of installation, setup, and integration. Choose the BPG400 for affordable and repeatable process to base pressure measurements in one economical package.

Advantages

• Extremely wide measurement range from 5 X 10 -10 mbar to atmosphere (3.8 X 10 -10 Torr to atmosphere)
• Excellent repeatability in the process pressure range from 10 -8 ... 10 -2 mbar of 5%
• The Pirani interlock protects the Bayard-Alpert system from premature filament burnout and excess contamination from high pressure operation
• Long-life yttrium oxide coated iridium filament
• Optional graphic display and Fieldbus interfaces available
• Automatic high vacuum Pirani adjustment reduces operator interventions

Applications

• Pressure measurement in semiconductor process and transfer chambers
• Industrial coating
• General vacuum measurement and control in the low to ultra high vacuum range

ASSOCIATED TECHNICAL INFORMATION

Brochures and Datasheets:

Datasheet - BPG400, BPG400-SD, BPG400-SP, BPG400-SR

Operations and Maintenance Manuals:

Communication Protocol - BPG400-SD, HPG400-SD

Communication Protocol - BPG400-SP, HPG400-SP

EDS for BPG400-SD with Float EDS for BPG400-SD with Float Configuration

EDS for BPG400-SD with Integer EDS for BPG400-SD with Integer Configuration

GSD for BPG400-SP

Instruction Sheet - BPG400, BPG400-SD, BPG400-SP, BPG400-SR

Instruction Sheet - BPG400-SD, BPG400-SP, BPG400-SR

Operating Manual - BPG400, BPG400-SD, BPG400-SP, BPG400-SR