Guardian Co-Deposition Controller

Simultaneous Deposition of Up to Eight Materials

Ideal for CIGS Thin Films Guardian can control deposition rates from 0.1 to 10,000 Å/s. It operates one or two sensors, up to 8 optical inputs and controls up to 8 deposition sources, enabling co-deposition of up to 8 materials. INFICON Guardian is ideal for applications such as fabrication of photovoltaic modules, OLEDs, photovoltaics, superconducting thin films and MBE. The Guardian Co-Deposition System is based on Electron Impact Emission Spectroscopy (EIES).

Features at a Glance

• Monitor and control simultaneous deposition of up to 8 materials
• Deposition rates from 0.1 to 10,000 Å/s
• Integrated EIES and QCM thin film process control
• 12 relay outputs and 16 digital inputs
• Windows-based software for setup and operation
• Compatible with INFICON Sentinel® sensors

ASSOCIATED TECHNICAL INFORMATION

Brochures and Datasheets:

   Brochure - Guardian Co-Deposition Controller

   Configuration Guide - Guardian Co-Deposition Controller

Operations and Maintenance Manuals:

   Operating Manual - Guardian Co-Deposition Controller

Software:

Software - Guardian_EIES_V5.11