Ideal for CIGS Thin Films Guardian can control deposition rates from 0.1 to 10,000 Å/s. It operates one or two sensors, up to 8 optical inputs and controls up to 8 deposition sources, enabling co-deposition of up to 8 materials. INFICON Guardian is ideal for applications such as fabrication of photovoltaic modules, OLEDs, photovoltaics, superconducting thin films and MBE. The Guardian Co-Deposition System is based on Electron Impact Emission Spectroscopy (EIES).
Features at a Glance
ASSOCIATED TECHNICAL INFORMATION
Brochures and Datasheets:
Operations and Maintenance Manuals: