Baffled Box Sources for ZnS/SiO

Our Baffled Box Zinc Sulphide/ Silicon Monoxide Sources are commonly used for subliming dielectrics such as Silicon Monoxide that frequently spit. These sources are well heat shielded, reducing the power required and providing a uniform sublimation temperature. Evaporant is positioned in the source within separate cavities, when heated it follows an indirect path through a series of baffles and then out of the exhaust chimney. The substrate cannot see the bulk material at any time. This essentially eliminates any chance of spitting and streaming which causes pinhole type defects. Many of the sources shown are available with up, down or horizontal exhaust ports. Custom fabrication and larger volume sources to fit your specific process needs are available upon request.

A paper "Silicon Monoxide Evaporation with the Multi-baffled Box Source" by Earl Olson of the Halex Corp. and R. D. Mathis describing the techniques of Silicon Monoxide deposition and results using the "Baffled Box Source" is available upon request.

SO Series Silicon Monoxide sources are improved models of our very successful SM series. The incorporate the same type of baffling and shielding as the SM sources, insuring an indirect path from source material to substrate.

The new SO Series SiO source offers the following features:

Longer life, eliminates leakage, loading without removal from system, completely sealed one unit construction.

Please visit the individual material pages for evaporation source recommendations. Click here to go to the Materials Division Page.