VSA100A differential to ambient

VSA100A differential to ambient

Manufacturer: INFICON

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The INFICON Vacuum Switch VSA100A is used as a safety switch in vacuum systems. For example, to automatically interrupt the gas supply when venting vacuum systems with a purge gas at a pressure of 6 mbar below atmospheric pressure. At a differential pressure of 6 mbar resp. return switching pressure of 3 mbar below atmospheric pressure, an elastic diaphragm actuates a changeover contact which in turn may be used to switch directly any ancillary equipment.

Benefits

  • Reliable and budget-priced vacuum switch
  • High life time
  • Rugged design
  • Easy to integrate
  • IP 44 protection

Typical Applications

  • Control of load lock chambers
  • Safety shutdown of vacuum systems