RSH-600 Rotary Sensor

RSH-600 Rotary Sensor

Manufacturer: INFICON

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Excellent Crystal Performance in Demanding Applications

RSH-600 Rotary Sensor Heads are designed for demanding processes, employing very thick films and several different materials. The RSH-600 holds six crystals in a thermally shielded, water-cooled housing, ensuring excellent crystal performance in temperature environments up to 300°C. Crystals are housed in an easy to remove Teflon® and stainless steel crystal holder.


  • Six crystals
  • Position feedback (Controller dependent)
  • Adjustable length (with optional flange)
  • Rugged design