PEG100 Medium to Ultra-High Vacuum Gauge

PEG100 Medium to Ultra-High Vacuum Gauge

Manufacturer: INFICON

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The INFICON Penning Gauge PEG100 provides reliable high vacuum measurements. The rugged penning cold cathode sensor has no filament to burn out. Due to titanium cathode plates and the reduced high voltage after plasma ignition, the gauge can be operated also in sputtering applications. The fieldbus options, in addition to the logarithmic analog output signal, allow easy integration into vacuum systems using Profibus DP or DeviceNet protocols.


  • Wide measurement range from 1 x 10-9 to 1 x 10-2 mbar (7.5 x 10-10 to 7.5 x 10-3 Torr)
  • All-metal cold cathode sensor (Penning) with ceramic feedthrough
  • Innovative electrode geometry provides excellent ignition properties
  • Decreased high voltage after plasma ignition and titanium cathode plates reduce risk of contamination, even during sputtering operations with argon
  • The anode ring and the titanium cathode can be cleaned or replaced easily
  • Minimal magnetic field intensity adjacent to gauge
  • LED indicator for power on and plasma ignited
  • Logarithmic analog output signal
  • Fieldbus interface (Profibus DB, DeviceNet) for easy integration into vacuum systems using network communications

Typical Applications

  • High vacuum pressure monitoring
  • Evaporation and sputtering systems
  • General vacuum measurement and control in the fine and high vacuum range